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The DNI's research
facilities include UV and visible Raman Micro Spectrometers,
micro-FTIR Spectrometer, several Scanning Electron Microscopes,
nanoindenter, and other equipment. Find out more about our
Centralized Materials Characterization Facility and Industry
Consortium at http://mcf.materials.drexel.edu/.
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EQUIPTMENT USAGE RATES 2006 |
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Machine
Name |
Int. Assisted/
Unassisted |
Ext. Assisted/
Unassisted |
Corporate |
Education |
Demos |
Service |
| ESEM FEI |
$55.00/$35.00 |
$65.00/$40.00 |
$300.00 |
$0.00 |
$0.00 |
$0.00 |
| SEM Zeiss |
$55.00/$35.00 |
$65.00/$40.00 |
$300.00 |
$0.00 |
$0.00 |
$0.00 |
| SEM Amray |
$45.00/$25.00 |
$55.00/$30.00 |
$250.00 |
$0.00 |
$0.00 |
$0.00 |
| XRD Siemens |
$40.00/$20.00 |
$50.00/$25.00 |
$125.00 |
$0.00 |
$0.00 |
$0.00 |
| Optical Microscope |
$35.00/$15.00 |
$45.00/$20.00 |
$100.00 |
$0.00 |
$0.00 |
$0.00 |
| UV Raman |
$60.00/$40.00 |
$85.00/$60.00 |
$500.00 |
$0.00 |
$0.00 |
$0.00 |
| Vis Raman |
$45.00/$25.00 |
$55.00/$30.00 |
$400.00 |
$0.00 |
$0.00 |
$0.00 |
| Micro-FTIR |
$45.00/$25.00 |
$55.00/$30.00 |
$200.00 |
$0.00 |
$0.00 |
$0.00 |
| Nano-Indenter |
$4.50/$2.50 |
$5.00/$3.00 |
$20.00 |
$0.00 |
$0.00 |
$0.00 |
| Micro-Hardness Tester |
$45.00/$25.00 |
$40.00/$15.00 |
$100.00 |
$0.00 |
$0.00 |
$0.00 |
| Assistance |
$20.00/$0.00 |
$25.00/$0.00 |
Formula |
$0.00 |
$0.00 |
$0.00 |
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MICROFABRICATION FACILITY EQUIPTMENT USAGE
RATES |
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Internal |
Internal Assisted |
External |
External Assisted |
Industry |
| General Use |
Hourly |
$0.00 |
$20.00 |
$5.00 |
$30.00 |
$100.00 |
| Photolithography |
Session |
$30.00 |
$50.00 |
$35.00 |
$60.00 |
$350.00 |
| Characterization (class 1) |
Hourly |
$5.00 |
$25.00 |
$10.00 |
$35.00 |
$100.00 |
| Evaporation E-beam (class 2) |
Per Run |
$20.00 |
$40.00 |
$25.00 |
$50.00 |
$250.00 |
| Plasma etching ICP DRIE (class 3) |
Per Run |
$30.00 |
$50.00 |
$35.00 |
$60.00 |
$350.00 |
| Visitors/tour fee |
Per Person |
$20.00 |
$20.00 |
$20.00 |
$20.00 |
$20.00 |
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| Academic Users Fee /hr |
$0.00 |
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| Initial Orientation |
$150.00 |
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| (includes 3 hour overview, gown, box of
gloves, locker) |
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| Equipment Class 1- Zygo Profilometer,
Profilometer, Ellipsometer |
| Equipment Class 2- Electron-beam Evaporator,
Photolithography |
| Equipment Class 3- Plasma Etching ICP DRIE
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| ESEM FEI |
Important
Features
*High vacuum – 10-7 Torr
* Variable
vacuum up to 10 Torr
* Peltier cooling stage
* Ability
to view “wet” samples
* Spatial resolution: ˜ 1.75
nm
* Scan Modes: Full Frame, Spot, Line & Partial
field
* Multiple sample holders, 16 sample Stubs
*
X,Y,Z,R motorized stage
* Digital image storage (floppy,
CD/R, network)
* Computer driven SEM
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*To reserve time or for more information,
please contact Rick Knight.
*FEESEM is located in the
Department of Materials Engineering and is operated by
Drexel University.
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| SEM Zeiss |
Important
Features
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| SEM Amray |
Important
Features
*High vacuum ˜ 10-6 Torr
*Spatial
resolution ˜ 1.75 nm
*Dual scan in SEI or BSE
*Dual
magnification
*Multiple scan modes: Full Frame, Spot,
Line and partial Field
*Multiple sample
holders:
*X,Y,R motorized Stage
*360 Degree Rotation,
90 Degree Tilt
*Digital image storage
*IR chamber view
camera
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*To reserve time or for more information,
please contact Rick Knight.
*Amray 1830/D4 is located in
the Department of Materials Engineering and is operated by
Materials Characterization Facility at Drexel
University.
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| XRD Siemens |
Important
Features
*1500W Cu fine focus tube
* Graphite
receiving monochromator
*May decouple drives for thin
film work
*Qualitative and quantitative analysis of
clays, refractories, fillers, corrosion products,
etc.
*Jade+ (MDI) analysis software
*Computer-based
JCPDS library for rapid, positive phase
identifications
*Low angle analysis of crystalline films
and coatings
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*To reserve time or for more information,
please contact Rick Knight.
*The Siemens X-Ray
Diffractometer is located in the Department of Materials
Engineering and is operated by Drexel University.
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| Optical
Microscope |
Important
Features
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| UV Raman |
Important
Features
*Magnifying and imaging
capabilities
*Motorized XYZ stages
*Heating/Freezing
stages
*Choice of excitation wavelength (UV, Visible,
near IR, Circular Polarized light)
*'Easy Confocal'
microscopy
* Rapid, non-destructive
* Easy or no
sample preparation (solids, liquids, gases)
*High
Spectral/Spatial resolution |
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* For more information, contact Dr. Zhorro
Nikolov
* Billing Rate: University Internal ($40/hour
unassisted, $60/hour assisted), University External
($60/hour unassisted, $85/hour assisted). Unassisted work is
possible only after a training course. Equipment Use
Form.
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| Vis Raman |
Important
Features
*Ar ion laser, 514.5 nm
*He-Ne
laser, 633 nm
*Semiconductor diode laser, 785 nm
*-70°
Centigrade Peltier cooled CCD detector
*XYZ motorized
mapping stage
*100 cm-1 cutoff notch
filter
*Magnification up to 1000x (x5, x20, x50, x100
objectives)
*Grams 32 spectral analysis software, and
geological spectra database
*8000 cm-1 extended scanning
range
*1800 l/mm and 1200 l/mm gratings
*Direct Raman
imaging through dielectric filters
*Videocamera and image
capture card |
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* For more information, contact Dr. Zhorro
Nikolov
* Sign out time on the Raman
* Billing Rate:
University Internal($25/hour unassisted, $45/hour assisted),
University External ($30/hour unassisted, $55/hour assisted)
Unassisted work is possible only after a training course.
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| Micro-FTIR |
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Important
Features
* Resolution: 0.025 cm-1 optical; 0.18
cm-1 unapodized
* IR Power: 40 mW at the sample
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Kinetic Scan Rates: 40 spectra/second
* Spectral range:
< 50 cm-1 to 7500 cm-1
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Excalibur FTS-3000 FTIR is located in the
Department of Materials Engineering and is operated by
Materials Characterization Facility at Drexel
University.
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| Nano-Indenter |
Important
Features
*Displacement resolution: <0.02
nm
*Maximum indentation depth: 500 µm
*Maximum load:
500 mN(50.8gm)
*Load resolution: 50 nN (5.1 µgm) |
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*To reserve time or for more information,
please contact Rick Knight.
*The Nano-Indenter is located
in the Department of Materials Engineering and is operated
by the Nanomaterials Group at Drexel University.
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| Micro-hardness Tester
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Important
Features
*Loads: 10,25,50,100,200,300,500,1000
grams
*Indentation times range from 5 seconds to 30
seconds
*Knoop or Vickers indenters
*Parallel jaw
clamping sample holder
*0.02mm stage movement in the X
and Y directions
*Direct indentation measuring on the
sample
*Dual objectives for sample area
identification.
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*To reserve time or for more information,
please contact Rick Knight.
*LECO M-400 is located in the
Department of Materials Engineering and is operated by
Drexel University.
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